Gases & Engineering

Gases & Engineering Gases & Engineering

PSA

PSA Argon Gas Recovery and Purification systems

Ar-PSA PSA Argon Gas Generators

System purifies argon-rich gas discharged from RH vacuum degassing furnaces, silicon monocrystallizer, etc. for separation of high-purity argon gas.

Contents
Principle Argon is adsorbed by zeolite, less than other gases of nitrogen, carbon monooxide and carbon dioxide contained in a raw gas.
By utilizing this characteristic, highpurity argon gas can be recovered and refined from the argon-rich raw gas.(Pantented)
Features 1.High-purity argon gas (99.999% max.) can be recovered.
2.High recovery yield of 70 to 80%.
Major Application 1.Steel industry Recovery of argon from the waste gas of:
RH vacuum degassing furnaces.
Continuous casting facilities.
LF furnaces.
2.Semiconductor industry
Recovery of argon from the waste gas of silicon monocrystallizer.
3.Others
Recovery of argon from other gases
General Specification Capacity : 1,000Nm max.3/hr per unit
Purity : 99.999% max.
Pressure : 0.49 to 0.69MPaG
Moisture : Dew point −70℃

Semiconductor Gases

Semiconductor Gases

We produce special material gases for manufacturing semiconductor products such as ICs, memories, liquid crystals, and solar cells.

NH3, CO, NO, C3H6, Etc.

Specialty Gases

Specialty Gases

We produce standard gases based on specialty gas analysis criteria, mixed industrial material gases, and high-purity gases.

JCSS Standard Gases, Liquefied Pure Gases, Compressed Pure Gases, Standard Gases, Mixed Gases, Standard Measuring, Precision Pressure Regulator, Liduefied gas regulating valve

Gas Chemicals

Gas Chemicals

We produce mainly sulfur-containing organic materials (industrial chemicals) used as industrial raw materials and electronic materials, and gas products (chemical gases) for food applications.

Industrial Chemicals (Thiophenol, Thioanisole, Sulfolane, Thionyl Chloride, Sulfuryl Chloride)

Engineering

Engineering

We produce gas generators and gas recovery and purification systems that use PSA technology.

PSA Oxygen Gas Generators, High Purity Hydrogen Gas, Etc.

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