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Electronic Gases

NH3 Ammonia  UN No.1005, CAS No.7664-41-7 

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Grade OPT RESEARCH SEG
Purity > 99.99997 % > 99.9995 % > 99.999 %
Cylinder・Contens

10L - 5kg ( 7.4m3 )

47L - 25kg ( 37.1m3 )

930L - 500kg ( 741.9m3 )

1860L - 1000kg ( 1483.8m3 )

Valve  S・W22・14・OL

2O Nitrous Oxide UN No. 1070, CAS No.10024-97-2 

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Grade RESEARCH SEG
Purity > 99.9995 % > 99.999 %
Cylinder・Contents

10L - 7.5kg ( 4.3m3 )

47L - 30kg ( 17.2m3 )

440L - 300kg ( 172.2m3 )

360L×2pcs. - 500kg ( 287.1m3 )

Valve S(B)・W22・14・OR

CO Carbon Monoxide UN No. 1016, CAS No. 630-08-0 

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Grade SEG
Purity > 99.995 %
Cylinder・Contents

10L - 9.80MPa ( 1.0m3 )

47L - 9.80MPa  ( 4.7m3 )

47L×28pcs. - 9.80MPa  ( 130.3m3 )

Valve  S・W22・14・OL

NO Nitric Oxide UN No. 1660, CAS No. 10102-43-9 

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Grade EG
Purity > 99.8 %
Cylinder・Contents

10L - 3.43MPa ( 0.4m3 )

47L - 3.43MPa  ( 1.7m3 )

47L×10pcs. - 3.43MPa  ( 16.6m3 )

Valve  S・W22・14・OR

B2H6 Diborane UN No. 1911, CAS No. 19287-45-7 

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Grade EG
Purity > 99.999 %
■ Diborane Mixture Gas
Grade EG
Balance Gas H2 , He , N2 , Ar (EG)
B2H6

H2 : 10 ppm ~ 20 %

He , N2 , Ar : 1 ~ 10 %

Cylinder・Contents

10L , 47L : 9.80MPa ( B2H6 : ~ 1 % )

                 7.35MPa ( B2H6 : ~ 5 % )

                 4.90MPa ( B2H6 : ~ 10 % )

                 2.94MPa ( B2H6 : ~ 20 % )

Valve  S・W22・14・OL

HCl Hydrogen Chloride  UN No. 1050, CAS No. 7647-01-0 

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Grade SEG EG
Purity > 99.999 % > 99.995 %
Cylinder・Contents

10L - 5kg ( 3.4m3 )

47L - 25kg ( 17.2m3 )

10L - 6kg ( 4.1m3 )

47L - 25kg ( 17.2m3 )

Valve  S・W26・14・OR

SiH2Cl2 Dichlorosilane UN No. 2189, CAS No. 4109-96-0 

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Grade EG
Purity > 99.9 %
Cylinder・Contents

10.1L - 9kg ( 2.3m3 )

41L - 37kg ( 9.3m3 )

Valve  S・W22・14・OL

CH4 Methane UN No. 1971, CAS No. 74-82-8 

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Grade RESEARCH SEG EG
Purity > 99.9999 % > 99.99 % > 99.9 %
Cylinder・Contents 47L - 14.70MPa  ( 7.0m3 )

10L - 9.80MPa  ( 1.0m3 )

47L - 9.80MPa  ( 4.7m3 )

Valve  B・W22・14・OL

C3H6 Propylene UN No. 1077, CAS No. 115-07-1 

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Grade SEG
Purity > 99.99 %
Cylinder・Contents 47L - 20kg ( 12.0m3 )
Valve S・W22・14・OL

C2H4 Ethylene UN No. 1962, CAS No. 74-85-1 

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Grade EG
Purity > 99.999 %
Cylinder・Contents 47L - 5kg ( 4.5m3 )
Valve  S・W22・14・OL

C3H8 Propane UN No. 1978, CAS No. 74-98-6 

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Grade EG
Purity > 99.999 %
Cylinder・Contents

10L - 4kg ( 2.3m3 )

47L - 10 , 15kg ( 5.7 , 8.6m3 )

Valve  S・W22・14・OL
■Propane Mixture Gas
Grade EG
Balance Gas H2 (EG)
C3H8 10 % , 30 %
N2 < 1 ppm
Cylinder・Contents

10 , 47L : 4.80MPa ( C3H8 : 10 % )

             : 1.60MPa ( C3H8 : 30 % ) 

Valve S・W22・14・OL

H2S Hydrogen Sulfide UN No. 1053, CAS No. 7783-06-4 

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Grade EG
Purity > 99.99 %
Cylinder・Contents

10L - 7kg ( 5.2m3 )

47L - 30kg ( 22.2m3 )

Valve  S・W22・14・OL

SO2 Sulfur Dioxide UN No. 1079, CAS No. 7446-09-5 

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Grade EG
Purity > 99.99 %
Cylinder・Contents 10L - 10kg ( 3.9m3 )
Valve B・W22・14・OR

BCl3 Boron Trichloride UN No. 1741, CAS No. 10294-34-5 

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Grade EG
Purity > 99.999 %
Cylinder・Contents

10L - 10kg ( 2.2m3 )

40L - 40kg ( 8.6m3 )

47L - 50kg ( 10.8m3 )

Valve  S・W26・14・OR

CF4 Tetrafluoromethane(R-14) UN No. 1982, CAS No. 75-73-0 

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Grade EG
Purity > 99.99 %
Cylinder・Contents

10L - 2kg ( 0.6m3 )

47L - 30kg ( 8.6m3 )

Valve  B・W22・14・OL

CO2 Carbon Dioxide UN No. 1013, CAS No. 124-38-9 

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Grade EG
Purity > 99.995 %
Cylinder・Contents

10L - 7.5kg ( 4.3m3 )

40L - 30kg ( 17.2m3 )

Valve  B・W22・14・OR

N2 Nitrogen UN No. 1066, CAS No. 7727-37-9 

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Grade EG
Purity > 99.9999 %
Cylinder・Contents

10L - 11.76MPa  ( 1.2m3 )

47L - 14.70MPa  ( 7.0m3 )

Valve  B・W22・14・OR

O2 Oxygen UN No. 1072, CAS No. 7782-44-7 

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Grade EG
Purity > 99.999 %
Cylinder・Contents

10L - 11.76MPa  ( 1.2m3 )

47L - 14.70MPa  ( 7.0m3 )

Valve  B・W22・14・OR

Ar Argon UN No. 1006, CAS No. 7440-37-1 

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Grade EG
Purity > 99.9999 %
Cylinder・Contents

10L - 11.76MPa  ( 1.2m3 )

47L - 14.70MPa  ( 7.0m3 )

Valve  B・W22・14・OR

He Helium UN No. 1046, CAS No. 7440-59-7 

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Grade EG
Purity > 99.9999 %
Cylinder・Contents

10L - 11.76MPa  ( 1.2m3 )

47L - 14.70MPa  ( 7.0m3 )

Valve  B・W22・14・OR

H2 Hydrogen UN No. 1049, CAS No. 1333-74-0 

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Grade EG
Purity > 99.9999 %
Cylinder・Contents

10L - 11.76MPa  ( 1.2m3 )

47L - 14.70MPa  ( 7.0m3 )

Valve  B・W22・14・OL