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Semiconductor Gases

Semiconductor Gases CONTACT

NH3 Ammonia UN No. 1005 CAS No.7664-41-7

Grade OPT RESEARCH SEG
Purity ＞99.99997 % ＞99.9995 % ＞99.999 %
Cylinder･Contens

10L - 5kg ( 7.4m3 )

47L - 25kg ( 37.1m3 )

930L - 500kg ( 741.9m3 )

1860L - 1000kg ( 1483.8m3 )
Valve  S・W22・14・OL

N2O Nitrous Oxide UN No. 1070 CAS No. 10024-97-2

Grade RESEARCH SEG
Purity ＞99.9995 % ＞99.999 %
Cylinder･Contens

10L - 7.5kg ( 4.3m3 )

47L - 30kg ( 17.2m3 )

440L - 300kg ( 172.2m3 )

360L×2本 - 500kg ( 287.1m3 )
Valve S(B)・W22・14・OR

CO Carbon Monoxide UN No. 1016 CAS No. 630-08-0

Grade SEG
Purity ＞99.995 %
Cylinder･Contens

10L - 9.80MPa ( 1.0m3 )

47L - 9.80MPa  ( 4.7m3 )

47L×28本 - 9.80MPa  ( 130.3m3 )
Valve  S・W22・14・OL

NO Nitric Oxide UN No. 1660 CAS No. 10102-43-9

Grade EG
Purity ＞99.8 %
Cylinder･Contens

10L - 3.43MPa ( 0.4m3 )

47L - 3.43MPa  ( 1.7m3 )

47L×10本 - 3.43MPa  ( 16.6m3 )
Valve  S・W22・14・OR

B2H6 Diborane UN No. 1911 CAS No. 19287-45-7

Grade EG
Purity ＞99.999 %

Propane Mixture Gas

Grade EG
Balance Gas H2 , He , N2 , Ar (EG)
B2H6

H2 : 10 ppm ～ 20 %

He , N2, Ar : 1 ～ 10 %
Cylinder･Contens

10L , 47L : 9.80MPa ( B2H6 ： ～ 1 % )

                 7.35MPa ( B2H6 ： ～ 5 % )

                 4.90MPa ( B2H6 ： ～ 10 % )

                 2.94MPa ( B2H6 ： ～ 20 % )
Valve  S・W22・14・OL

HCl ydrogen Chloride UN No. 1050 CAS No. 7647-01-0

Grade SEG EG
Purity ＞99.999 % ＞99.995 %
Cylinder･Contens

47L - 25kg ( 17.2m3 )

10L - 6kg ( 4.1m3 )

47L - 25kg ( 17.2m3 )
Valve  S・W26・14・OR

SiH2Cl2 Dichlorosilane UN No. 2189 CAS No. 4109-96-0

Grade EG
Purity ＞99.9 %
Cylinder･Contens

10.1L - 9kg ( 2.3m3 )

41L - 37kg ( 9.3m3 )
Valve  S・W22・14・OL

CH4 Methane UN No. 1971 CAS No. 74-82-8

Grade SEG EG
Purity ＞99.99 % ＞99.9 %
Cylinder･Contens

10L - 9.80MPa  ( 1.0m3 )

47L - 9.80MPa  ( 4.7m3 )
Valve  B・W22・14・OL

C3H6 Propylene UN No. 1077 CAS No. 115-07-1

Grade SEG
Purity ＞99.99 %
Cylinder･Contens 47L - 20kg ( 12.0m3 )
Valve S・W22・14・OL

C2H4 Ethylene UN No. 1962 CAS No. 74-85-1

Grade EG
Purity ＞99.999 %
Cylinder･Contens 47L - 5kg ( 4.5m3 )
Valve  S・W22・14・OL

C3H8 Propane UN No. 1978 CAS No. 74-98-6

Grade EG
Purity ＞99.999 %
Cylinder･Contens

10L - 4kg ( 2.3m3 )

47L - 10 , 15kg ( 5.7 , 8.6m3 )
Valve  S・W22・14・OL

Propane Mixture Gas

Grade EG
Balance Gas H2 (EG)
C3H8 10 % , 30 %
N2 < 1 ppm
Cylinder･Contens

10 , 47L : 4.80MPa ( C3H8 : 10 % )

             : 1.60MPa ( C3H8 : 30 % ) 
Valve S・W22・14・OL

H2S Hydrogen Sulfide UN No. 1053 CAS No. 7783-06-4

Grade EG
Purity ＞99.99 %
Cylinder･Contens

10L - 7kg ( 5.2m3 )

47L - 30kg ( 22.2m3 )
Valve  S・W22・14・OL

SO2 Sulfur Dioxide UN No. 1079 CAS No. 7446-09-5

Grade EG
Purity ＞99.99 %
Cylinder･Contens 10L - 10kg ( 3.9m3 )
Valve B・W22・14・OR

BCl3 Boron Trichloride UN No. 1741 CAS No. 10294-34-5

Grade EG
Purity ＞99.999 %
Cylinder･Contens

10L - 10kg ( 2.2m3 )

40L - 40kg ( 8.6m3 )

47L - 50kg ( 10.8m3 )
Valve  S・W26・14・OR

CF4 Tetrafluoromethane UN No. 1982 CAS No. 75-73-0

Grade EG
Purity ＞99.99 %
Cylinder･Contens

10L - 2kg ( 0.6m3 )

47L - 30kg ( 8.6m3 )
Valve  B・W22・14・OL

CO2 Carbon Dioxide UN No. 1013 CAS No. 124-38-9

Grade EG
Purity ＞99.995 %
Cylinder･Contens

10L - 7.5kg ( 4.3m3 )

40L - 30kg ( 17.2m3 )
Valve  B・W22・14・OR

N2 Nitrogen UN No. 1066 CAS No. 7727-37-9

Grade EG
Purity ＞99.9999 %
Cylinder･Contens

10L - 11.76MPa  ( 1.2m3 )

47L - 14.70MPa  ( 7.0m3 )
Valve  B・W22・14・OR

O2 Oxygen UN No. 1072 CAS No. 7782-44-7

Grade EG
Purity ＞99.999 %
Cylinder･Contens

10L - 11.76MPa  ( 1.2m3 )

47L - 14.70MPa  ( 7.0m3 )
Valve  B・W22・14・OR

Ar Argon UN No. 1006 CAS No. 7440-37-1

Grade EG
Purity ＞99.9999 %
Cylinder･Contens

10L - 11.76MPa  ( 1.2m3 )

47L - 14.70MPa  ( 7.0m3 )
Valve  B・W22・14・OR

He Helium UN No. 1046 CAS No. 7440-59-7

Grade EG
Purity ＞99.9999 %
Cylinder･Contens

10L - 11.76MPa  ( 1.2m3 )

47L - 14.70MPa  ( 7.0m3 )
Valve  B・W22・14・OR

H2 Hydrogen UN No. 1049 CAS No.1333-74-0

Grade EG
Purity ＞99.9999 %
Cylinder･Contens

10L - 11.76MPa  ( 1.2m3 )

47L - 14.70MPa  ( 7.0m3 )
Valve  B・W22・14・OL

Semiconductor Gases

Semiconductor Gases

We produce special material gases for manufacturing semiconductor products such as ICs, memories, liquid crystals, and solar cells.

NH3, CO, NO, C3H6, Etc.

Specialty Gases

Specialty Gases

We produce standard gases based on specialty gas analysis criteria, mixed industrial material gases, and high-purity gases.

JCSS Standard Gases, Liquefied Pure Gases, Compressed Pure Gases, Standard Gases, Mixed Gases, Standard Measuring, Precision Pressure Regulator, Liduefied gas regulating valve

Gas Chemicals

Gas Chemicals

We produce mainly sulfur-containing organic materials (industrial chemicals) used as industrial raw materials and electronic materials, and gas products (chemical gases) for food applications.

Industrial Chemicals (Thiophenol, Thioanisole, Sulfolane, Thionyl Chloride, Sulfuryl Chloride)

Engineering

Engineering

We produce gas generators and gas recovery and purification systems that use PSA technology.

PSA Oxygen Gas Generators, High Purity Hydrogen Gas, Etc.

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